Integrated Circuit / Data Storage
High-tech electronics demand products that optimize performance. For years, Nanophase has supplied innovative products that achieve superior results and allow our customers to develop next generation electronics technology.
NanoArc® Cerium Oxide provides low defectivity, selectivity and high planarization for direct Shallow Trench Isolation, Inter Level Dielectric, and Data Storage Glass Substrate CMP. NanoArc® Aluminum Oxide can be used for metal and dielectric polishing applications, such as Magnetic Heads and Ni-Phos layers. Our expert technical support can assist you to customize our dispersions and slurries to meet your needs.